PROGRESS: Completed Project	PROJECT REF: PA162
PROJECT TITLE: Microphones with Integrated Electronic Devices and Process of Realization
PROJECT DESCRIPTION: Miniaturized microphones are used in a wide range of applications, such as cell phones, hearing aids, smart toys and surveillance devices. It would be desirable to design such microphones and manufacturing methods therefore that allow batch production and allow the integration of the microphone with miniaturized devices having other functions. Microfabrication of various types of miniature microphones has been explored. In the present invention, a device is proposed consisting of one or more microphones with micro-meter to milli-meter sized acoustic excitation pressure sensing membranes integrated with signal sensing and amplifying electronic elements. Acoustic excitation is converted to an electrical signal using a capacitor with an air-gap formed between a sensing membrane(sensing electrode) and a perforated rigid back-plate membrane(counter electrode). The capacitor can self-bias using charges permanently injected into an electrically floating electrode embedded inside one of the membranes. Alternatively, the capacitor can be biased externally. A process is now proposed to allow simultaneous realization of the mechanical component for acoustic pressure sensing and the electronic components for electrical signal processing is also proposed. Potential Application: - Mobile phones, hearing aids, surveillance, toys, etc. Advantages over Present Technologies: 1. Simultaneous realization of both the mechanical and electronic components of an “integrated” microphone using micro-fabrication process 2. Enhance device performance and reliability so that number of sub-components can be reduced 3. Simple process 4. High electronic programmability 5. High ease of integration
FOCUS AREA(S): Integrated Circuit Design
KEYWORDS: mobile phone, hearing aids, microphone, surveillance, toy
MODE OF COLLABORATION: Technology Licensing, Further R&D Collaboration
STATUS PATENT: Granted	PATENT NO: US6677176
ORGANIZATION: Hong Kong University of Science and Technology R and D Corporation Limited
CONTACT PERSON: Shirley Woo	EMAIL: cawoosw@ust.hk
TEL: (852)-23587918	FAX: (852)-23582751
WEBSITE: http://rdc.ust.hk/	DATE: 03/01/2005